Whitelight-interferometer

Two economical microscopes called smartWLI-Basic and smartWLI-Extended as well as an upgrade to existing microscopes called smartWLI-microscope are available.
The strength of these instruments is the economical price as well as an extremely fast calculation algorithm which makes them the fastest WLI on the market!

Principal features:
. Non-contact
. Nanometer accuracy
. Fast
. Reliable

White-light interferometry is among the proven optical measurement techniques for recording 3-D topographies with depth resolution in the lower nanometre range. Because the measurement points are acquired and processed in parallel, the height information can be gathered over a large area in a very short time. Typical applications in research and in quality management are the characterisation of surfaces with different roughness values (wafer structures, mirrors, glass, metals), the determination of step heights and the precise measurement of curved surfaces, such as microlenses. The product family smartWLI offers innovative solutions utilising this measurement principle. The control and analysis of the entire measurement process is done using the proven smartWLI software. The efficient, robust and highly accurate analysis algorithms are the result of extensive research and experience in this area.

Technical Specifications:

Technical data smartWLI basic:
• Stand with column 245mm
• Manual XY table (160x160mm2, movement 73x55mm2)
• SmartWLI-basic measuring head with following specifications:
• LED illumination
• Interference Objective 10x or 20x
    (10x field of view about 1.0 x 0.75 mm2, resolution about 2.7 µm)
    (20x field of view about 0.5 x 0.375 mm2, resolution about 1.3 µm)
• Piezo-motor for z-movement of objective over a range of up to 400 µm
• CCD camera with 782 x 582 pixel, GigE
    The camera may be used for traditional microscopy imaging as well as the    white light interferometry
• PC with I5 processor, MS Windows 7, 4 GB RAM, NVIDIA GPU for ultra fast data processing, TFT-monitor, keyboard, mouse
• Software martWLI to measure topography as well as for exporting the 3D-data with direct interface to the MountainsMap® Image Topography image treatment software, including documentation
• MountainsMap® Image Topography software for image treatment, data analysis and report generation

Technical data smartWLI extended:
• Granite table with granite column to hold the objective head
• Motorized XY table (226x232mm2, movement 76x52mm2)
• SmartWLI-extended measuring head with following specifications:
• Nosepiece for 4 objectives
• Powerful LED illumination
• Interference Objective 10x or 20x
(10x field of view about 1.0 x 0.75 mm2, resolution about 2.7 µm)
(20x field of view about 0.5 x 0.375 mm2, resolution about 1.3 µm)
• Piezo-motor for z-movement of objective over a range of up to 400 µm
• CCD camera with 782 x 582 pixel, GigE
The camera may be used for traditional microscopy imaging as well as for the white light interferometry
• PC with I5 processor, MS Windows 7, 4 GB RAM, NVIDIA GPU for ultra fast data processing, TFT-monitor, keyboard, mouse
• Software smartWLI to measure topography as well as for exporting the 3D-data with direct interface to the MountainsMap® Image Topography image treatment software, including documentation
• MountainsMap® Image Topography software for image treatment, data analysis and report generation

Applications

Measurement of form and roughness of various surfaces.

Upgrade of existing optical microscopes to 3D whitelight-interferometry.

Film thickness measurement of transparent layers from 2 to 200 micrometer thickness.