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Sigma Instruments

SQM160
SQM242 PCI card
Q-pod

 

In-Situ Thin Film Measurement & Control with QCM sensors

 

The QCM technology is the most commonly used method to monitor and control rate and thickness in In-Situ deposition processes. Our broad line of QCM instrumentation is including deposition monitors, controllers, crucible indexer, software and vacuum accesories such as sensors and feedthroughs.
The powerful and easy-to-use instruments allow for reliable and accurate rate/thickness measurement and control in single and multi layer thin film processes, simultaneous deposition Co-Deposition of multiple matrials, data logging and graphing.

 

 

Products:

 

-Q-pod Single Channel Quartz Crystal Monitor
-SQM 160 Multi-Channel Quartz Crystal Monitor
-SQM 242 Co-Deposition Controller on PCI-Card
-SQC 300 Series Multi-Layer Co-Deposition Controllers
-EIES Gurdian IV
-CI 100 Crucible Indexer
-QCM Sensors, Feedthoughs and Accessories
-EIES Gurdian IV

 


Applications:

 

-Physical Vapor Deposition Processes 

- Vacuum coating instruments
 

 

 

 

 

 

 

 

 

 

 

 

 

 

QCM measurement setup
Crucible Indexer
Crucible Indexer software
QCM sensors
Contact
Schaefer Technologie GmbH
Robert-Bosch-Str. 31
63225 Langen, Deutschland
Telefon +49-6103-300 98 0
Telefax +49-6103-300 98 29
info@schaefer-tec.com
www.schaefer-tec.com

Further Information

Links
- Website Sigma Instruments


Downloads
- Q-pod Brochure (1.1 MB)

- SQM-160 Brochure (0.1 MB)

- SQM-242 Brochure (0.2 MB)

- SQC-300 Brochure (0.3 MB)

- FAQ Sensor Installation (0.1 MB)

 

 

 

Mail to Schaefer