Sensofar optical Profiler

Sensofar is one of the leading manufacturers of optical profilers.
Using patented display technology, Sensofar is the only company worldwide, that combines interferometry and confocal microscopy in a single, small profiler.
Switching between the different measurements modes is as simple as clicking a button and flipping the appropriate objective. Thus a wide range of different samples can be measured within seconds.

There is an almost unlimited number of applications to be measured with the system, ranging from roughness measurements on highly polished, super smooth surfaces with a vertical resolution of down to 0.01nm in interferometric mode to the measurement on very rough, low reflective samples with local slopes of up to 70degrees in confocal mode.
Using a short wavelength LED allows the highest possible lateral resolution. This innovative concept of illuminating the sample comes with no moving parts inside the scanhead, thus avoiding typical problems of Nipkow disk-based or Confocal Laser Scanning microscopes.
Sensofar offers a broad range of different instruments all using the same technology, but being adapted to special purposes.
The potable systems are used for big, heavy samples (like in printing industry) which cannot easily be placed under the microscope. The standard systems are typically used in R&D or QC. Of course fully automated systems, mainly for semi-conductor industries are available as well as custom-made instruments.
The product line is completed by a number of options, e.g. a thin film measurement sensor, allowing the determination of film thicknesses down to 10nm with a resolution of 0.1nm.

Products:

- Sensofar PLµ NEOX: Dual-lightsource and dual camera, Interferometric and Confocal, spectroscopic reflectometer as option

- Sensofar PLµ 1300: portable optical profiler, well suited for the measurement of cylinders

- Sensofar PLµ apex: Lens shape, sperical and aspherical

Applications

- Measuring of surface topology, surface topography, roughness and profile.

- Very smooth surfaces in the order of nanometer roughness up to very rough surfaces.

- Semiconductor structures, MEMS, solar technology.

- Measurement of thin, transparent layers of some nanometers thickness up to several hundred micrometer thickness.  

- Interferometry; Confocal

- Optical Profiling

- Lens radius measurements, aspheric lenses

- Quality control in a production environment