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Park Systems AFM

Park Systems NX10
Park Systems XE-100
AFM image, atomic steps
AFM image, cell
Comparison Park XE-AFM - Electron microscope

NEW: The new AFM from Park Systems: NX10

 

http://parkafm.com/nx/

 

The World's Most Accurate AFM

 

 

 

 

Using its long tradition in the manufacturing of Scanning Probe Microscopes, Park has combined in the new XE-series the well proven ease-of-use with a number of technical innovations you can hardly find with other instruments.
The most important feature is the decoupling of X,Y and Z scanner, having the advantage that a “True Non-Contact” Mode can be realised being very gentle to both, your sample and your tip. The X,Y flexure scanner scans highly accurate and flat and is specified with an out-of-plane movement less then 1nm over 50micron scan range, respectively 2nm over 100 micron X,Y scan range. Other then piezo tubes typically used in other AFM, the Park flexure scanner images flat samples real flat without further image processing. All Park AFM are of course hardware-linearised, for small scan ranges the linearization can be switched off and come with a high resolution on-axis video optics.
All Park AFM use the same technique so the main difference can be found in the maximum sample size and the level of automation.
The Park XE series AFM comprise a number of different research instruments as well as systems dedicated to special applications, e.g. Optical Scanning Near Field Microscopes (SNOM) or the new XE-Bio, which introduces for the first time the new SICM (Scanning Ion Conductance) mode, which allows to image biological samples in their natural surrounding without any mechanical impact of the tip.
Coupling of the AFM with other instruments (e.g. a Raman spectrometer) is easily possible.
Besides these instruments mainly dedicated to research, there is also a complete line of fully automated systems available, targeting to industrial applications.  

  

The base of the great success of the Park XE-AFM series are the technical advantages:

 

- New AFM platform with fast Z-scanner, separated from the XY-scanner, flexure scanner instead of tube piezos, closed loop for XY and Z (separately switchable to open loop)

 

- True Non Contact Mode - no impact to the sample and optimum lifetime even for very sensitive measuring tips, resulting in the best possible AFM resolution 

 

- Nanometrology: < 1nm Z-deviation when scanning flat surfaces over a 50 micron scan range (without software correction); excellent linearity and orthogonality (scans under 0° and 90° are identical)

 

- Easy to use: Good top view optics and the possibility to exchange tips using your fingers 

 

 

 

       Instruments

  • NEW: NX10
  • XE-70  (inexpensive AFM for research)
  • XE-100  (universal AFM) 
  • XE-150  (motorised table)
  • XE-200  (200µm scanrange, large table for 8 Inch wafer)
  • XE-NSOM  (NSOM, Raman and other optical techniques) 
  • XE-BIO  (measurements on life cells with ICM; Ion Conductance Microscopy, on inverted microscope)  

 

Applications:

 

- Atomic Force Microscopy (AFM, DFM)

- Scanning Tunneling Microscopy (STM)

- Lateral Force Microscopy (LFM)

- True Non-Contact Mode (nc-AFM)

- Phase Imaging / Phase Detection Microscopy (PDM)

- Magnetic Force Microscopy (MFM)

- Scanning Thermal Microscopy (SThM)

- Scanning Kelvin Force Microscopy (SKFM)

- Force-distance Spectroscopy (F-d Spectroscopy)

- Force Modulation Microscopy (FMM)

- Conductive AFM (I-AFM)

- Electrostatic Force Microscopy (EFM, DC-EFM)

- Scanning Kelvin Probe Microscopy (SKPM)

- Scanning Capacitance Microscopy (SCM)

- Scanning Spreading Resistance Microscopy (SSRM)

- Nanoindentation

- Nanolithography

- Nanomanipulation

- Tip Enhanced Raman Spectroscopy (TERS)

- Electrochemistry AFM

- Scanning Nearfield Optical Microscopy (NSOM)

- Ion Conductance Microscopy (live cell imaging) 

 

 

Park Systems Industrial AFM's

The automatic Park AFM's are used in the semiconductor industry for various applications.

Please contact us for more details

Instruments

- XE-HDM

- XE-PTR

- XE-3DM

- XE-CMP

- XE-WAFER

- XE-LCD

 

Contact
Schaefer-Tec AG
Badimatte 21
Postfach 431
3422 Kirchberg, Schweiz
Telefon + 41 - 34 - 423 70 70
Telefax + 41 - 34 - 423 70 75
ch@schaefer-tec.com
www.schaefer-tec.com

Further information

Links
- Website Park Systems
- Applications

Downloads
- XE-100 Brochure (0.9 MB)

- XE-150 Brochure (1.3 MB)

- XE-Bio Brochure (3.5 MB)

- XE-NSOM Brochure (1.9 MB) 

Mail to Schaefer